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Proceedings Paper

Cumulative effect and cutting quality improvement of XeCl laser ablation of PMMA
Author(s): Qihong Lou; Hongping Guo
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Paper Abstract

In this paper, the ablation processes were investigated using light deflection spectroscopy as a detection method. The cumulative effect of PMMA near the ablation threshold was studied in detail, and the cutting-edge quality of photoablation was improved to some extent by a nitrogen gas stream.

Paper Details

Date Published: 1 December 1991
PDF: 6 pages
Proc. SPIE 1598, Lasers in Microelectronic Manufacturing, (1 December 1991); doi: 10.1117/12.51041
Show Author Affiliations
Qihong Lou, Shanghai Institute of Optics and Fine Mechanics (China)
Hongping Guo, Shanghai Institute of Optics and Fine Mechanics (China)

Published in SPIE Proceedings Vol. 1598:
Lasers in Microelectronic Manufacturing
Bodil Braren, Editor(s)

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