Share Email Print

Proceedings Paper

IC rewiring by laser microchemistry
Author(s): Gerard Pelous; Yves Guern; D. Gobleid; J. David; A. Chion; Didier Tonneau
Format Member Price Non-Member Price
PDF $14.40 $18.00

Paper Abstract

ICs interconnection networks can be locally modified using a tightly focused laser beam to induce chemical reactions on the circuit surface. Owing to the precursor used, conductors and insulators can either be etched or deposited within the laser spot. Bertin & Co. have recently developed a line of laser-assisted tools dedicated to VLSI prototypes rewiring. This paper summarizes the tests performed on various technology devices from major IC manufacturers: IBM, STM, and Texas Instruments. The different repair steps and results of the characterization tests are presented.

Paper Details

Date Published: 1 December 1991
PDF: 10 pages
Proc. SPIE 1598, Lasers in Microelectronic Manufacturing, (1 December 1991); doi: 10.1117/12.51036
Show Author Affiliations
Gerard Pelous, Societe BERTIN (France)
Yves Guern, Societe BERTIN (France)
D. Gobleid, Texas Instruments (France)
J. David, IBM/Corbeil (France)
A. Chion, SGS-Thomson (France)
Didier Tonneau, CNRS (France)

Published in SPIE Proceedings Vol. 1598:
Lasers in Microelectronic Manufacturing
Bodil Braren, Editor(s)

© SPIE. Terms of Use
Back to Top