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Proceedings Paper

Rewritable optical recording In-Zn oxide films grown by pulsed laser deposition method
Author(s): Takanori Aoki; Akio Suzuki; Tatsuhiko Matsushita; Makoto Akizuki; Masahiro Okuda
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Paper Abstract

The In-Zn oxide films with a laminated multilayer structure of each layer of In2O3 and ZnO were grown on glass substrates or polycarbonate disk substrates by pulsed laser deposition using a split target consisted of In2O3 and ZnO. For the disk sample with 60-layers, which was approximately 30 nm thick, fabricated at the trace ratio (the ratio of time required to irradiate each part of the split target) of In2O3:ZnO = 1:1, the CNR of approximately 60 dB was obtained for 3T signal (f = 58.5 MHz, λ = 406 nm, NA = 0.65).

Paper Details

Date Published: 9 April 2003
PDF: 6 pages
Proc. SPIE 5060, Sixth International Symposium on Optical Storage (ISOS 2002), (9 April 2003); doi: 10.1117/12.510302
Show Author Affiliations
Takanori Aoki, Osaka Sangyo Univ. (Japan)
Akio Suzuki, Osaka Sangyo Univ. (Japan)
Tatsuhiko Matsushita, Osaka Sangyo Univ. (Japan)
Makoto Akizuki, Osaka Sangyo Univ. (Japan)
Masahiro Okuda, Okuda Technical Office (Japan)

Published in SPIE Proceedings Vol. 5060:
Sixth International Symposium on Optical Storage (ISOS 2002)
Fuxi Gan; Zuoyi Li, Editor(s)

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