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Proceedings Paper

Preparation and properties of AgOx films for LSC-super-RENS
Author(s): Yuepin Zhang; Xianying Wang; Hao Ruan; Defang Shen; Fuxi Gan
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Paper Abstract

In this paper AgOx films for super resolution near-field structure application were prepared by reactive sputtering. The switching properties of AgOx films were studied by analyzing the relationship between the transmittance and the laser power. We gained results that AgOx films had excellent switching properties and the reaction (formula available in paper) was reversible. The structures of AgOx films were investigated by X-ray diffraction and TEM.

Paper Details

Date Published: 9 April 2003
PDF: 3 pages
Proc. SPIE 5060, Sixth International Symposium on Optical Storage (ISOS 2002), (9 April 2003); doi: 10.1117/12.510267
Show Author Affiliations
Yuepin Zhang, Shanghai Institute of Optics and Fine Mechanics and Ningbo Univ. (China)
Xianying Wang, Shanghai Institute of Optics and Fine Mechanics (China)
Hao Ruan, Shanghai Institute of Optics and Fine Mechanics (China)
Defang Shen, Shanghai Institute of Optics and Fine Mechanics (China)
Fuxi Gan, Shanghai Institute of Optics and Fine Mechanics (China)


Published in SPIE Proceedings Vol. 5060:
Sixth International Symposium on Optical Storage (ISOS 2002)
Fuxi Gan; Zuoyi Li, Editor(s)

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