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Proceedings Paper

Material influence on cutting and drilling of metals using copper vapor lasers
Author(s): Roland Kupfer; Hans W. Bergmann; Marion Lingenauer
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Paper Abstract

Up to now, copper vapor lasers (CVLs) have been mainly applied in the field of nuclear fuel enrichment, as illumination sources, in short time photography and in medical applications. Due to their interesting characteristics (short pulse duration, high repetition rate) these lasers might also become useful in the field of materials processing. In this paper recent investigations on the drilling behavior of different metals with a CVL are reported. Fine drilled holes in thin metal sheets with minimized heat affected zones could be obtained. Microscopical investigations were used to characterize the influence of different substrates and processing conditions.

Paper Details

Date Published: 1 December 1991
PDF: 15 pages
Proc. SPIE 1598, Lasers in Microelectronic Manufacturing, (1 December 1991); doi: 10.1117/12.51025
Show Author Affiliations
Roland Kupfer, Univ. Erlangen-Nuernberg (Germany)
Hans W. Bergmann, Univ. Erlangen-Nuernberg (Germany)
Marion Lingenauer, Univ. Erlangen-Nuernberg (Germany)

Published in SPIE Proceedings Vol. 1598:
Lasers in Microelectronic Manufacturing
Bodil Braren, Editor(s)

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