Share Email Print

Proceedings Paper

Excimer laser projector for microelectronics applications
Format Member Price Non-Member Price
PDF $14.40 $18.00

Paper Abstract

Fully integrated excimer laser mask macro and microprojectors and application workstations that produce on the workpiece illumination uniformities as low as +/-5% with overall energy throughput efficiencies of up to 70% are described.

Paper Details

Date Published: 1 December 1991
PDF: 10 pages
Proc. SPIE 1598, Lasers in Microelectronic Manufacturing, (1 December 1991); doi: 10.1117/12.51024
Show Author Affiliations
Phil T. Rumsby, Exitech Ltd. (United Kingdom)
Malcolm C. Gower, Exitech Ltd. (United Kingdom)

Published in SPIE Proceedings Vol. 1598:
Lasers in Microelectronic Manufacturing
Bodil Braren, Editor(s)

© SPIE. Terms of Use
Back to Top