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Proceedings Paper

Excimer laser projector for microelectronics applications
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Paper Abstract

Fully integrated excimer laser mask macro and microprojectors and application workstations that produce on the workpiece illumination uniformities as low as +/-5% with overall energy throughput efficiencies of up to 70% are described.

Paper Details

Date Published: 1 December 1991
PDF: 10 pages
Proc. SPIE 1598, Lasers in Microelectronic Manufacturing, (1 December 1991); doi: 10.1117/12.51024
Show Author Affiliations
Phil T. Rumsby, Exitech Ltd. (United Kingdom)
Malcolm C. Gower, Exitech Ltd. (United Kingdom)


Published in SPIE Proceedings Vol. 1598:
Lasers in Microelectronic Manufacturing
Bodil Braren, Editor(s)

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