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Proceedings Paper

Thin-film selective multishot ablation at 248 nm
Author(s): Hans Eckard Hunger; H. Pietsch; Stefan Petzoldt; Eckart Matthias
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Paper Abstract

Excimer laser ablation of multi-layered films was studied using the photoacoustic mirage effect technique. Layered systems of a polymer-metal-SiO2 type was investigated for various metals between 0.5 and 2 J/cm2. Significant changes in the deflection signal were found when the ablation passed the interface between subsequent layers. This effect can be used to distinguish between different materials and is therefore suited for an in situ control of pulsed laser processing.

Paper Details

Date Published: 1 December 1991
PDF: 8 pages
Proc. SPIE 1598, Lasers in Microelectronic Manufacturing, (1 December 1991); doi: 10.1117/12.51022
Show Author Affiliations
Hans Eckard Hunger, Freie Univ. Berlin (Germany)
H. Pietsch, Freie Univ. Berlin (Germany)
Stefan Petzoldt, Freie Univ. Berlin (Germany)
Eckart Matthias, Freie Univ. Berlin (Germany)

Published in SPIE Proceedings Vol. 1598:
Lasers in Microelectronic Manufacturing
Bodil Braren, Editor(s)

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