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Proceedings Paper

Efficient laser cleaning of small particulates using pulsed laser irradiation synchronized with liquid-film deposition
Author(s): Andrew C. Tam; Werner Zapka; Winfrid Ziemlich
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Paper Abstract

Pulsed laser heating of a surface is shown to be a promising new approach for effective cleaning of small particulate contaminations. Various versions of such a technique of laser cleaning is possible, depending on where the laser irradiation is absorbed and whether a thin film is deposited on the surface to enhance the cleaning. We have observed that laser cleaning with the highest efficiency can be achieved by choosing a laser wavelength (typically ultraviolet) that is strongly absorbed by the surface, and by pulse-depositing a water film of thickness on the order of microns on the surface momentarily before the pulse laser irradiation. This permits the effective removal of particles smaller than approximately equals 20 micrometers , down to as small as 0.1 micrometers , from a solid surface, using a modest ultraviolet laser fluence of approximately equals 0.1 J/cm2.

Paper Details

Date Published: 1 December 1991
PDF: 6 pages
Proc. SPIE 1598, Lasers in Microelectronic Manufacturing, (1 December 1991); doi: 10.1117/12.51021
Show Author Affiliations
Andrew C. Tam, IBM/Almaden Research Ctr. (United States)
Werner Zapka, IBM/German Manufacturing Technology Ctr. (Germany)
Winfrid Ziemlich, IBM/German Manufacturing Technology Ctr. (Germany)

Published in SPIE Proceedings Vol. 1598:
Lasers in Microelectronic Manufacturing
Bodil Braren, Editor(s)

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