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Proceedings Paper

Application of phase shifting technique for SEM scanning moire method im MEMS
Author(s): HaiXia Shang; Huimin Xie; Fulong Dai
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Paper Abstract

A new phase shifting SEM scanning moire method is proposed in this paper. The phase shifting technique is realized in four steps from 0 to 2 π by shifting electron beam in y-axis direction controlled by SEM system. It is successfully applied to measure the virtual strain of a MEMS structure with grating of 5000 lines/mm. The experiments prove the technique can be widely used in meso-deformation measurement, and also show the sensitivity of experiments is highly improved after phase shifting technique. It provides a new way for disposal of fringes patterns in sub-micro moire method.

Paper Details

Date Published: 29 April 2003
PDF: 8 pages
Proc. SPIE 5058, Optical Technology and Image Processing for Fluids and Solids Diagnostics 2002, (29 April 2003); doi: 10.1117/12.509793
Show Author Affiliations
HaiXia Shang, Tsinghua Univ. (China)
Huimin Xie, Tsinghua Univ. (China)
Fulong Dai, Tsinghua Univ. (China)


Published in SPIE Proceedings Vol. 5058:
Optical Technology and Image Processing for Fluids and Solids Diagnostics 2002
Gong Xin Shen; Soyoung S. Cha; Fu-Pen Chiang; Carolyn R. Mercer, Editor(s)

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