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Proceedings Paper

Micro-deformation measurement using focused ion beam moire method
Author(s): Huimin Xie; Biao Li; Robert E. Geer; Bai Xu; James Castracane; Fulong Dai
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Paper Abstract

A new focused ion beam (FIB) miore method is proposed to measure the in-plane deformation of object in a micrometer scale. The FIB moire is generated by the interference bewteen a prepared specimen grating and FIB raster scan lines. The principle of the FIB moire is described. Several specimen gratings with 0.14 and 0.20 micron spacing are used to generate FIB miore patterns. The FIB moire method is successfully used to measure the residual deformation in a MEMS structure after removing the SiO2 sacrificial layer with a 5000 lines/mm grating. The results demonstrate the feasibility of this method.

Paper Details

Date Published: 29 April 2003
PDF: 10 pages
Proc. SPIE 5058, Optical Technology and Image Processing for Fluids and Solids Diagnostics 2002, (29 April 2003); doi: 10.1117/12.509789
Show Author Affiliations
Huimin Xie, Tsinghua Univ. (China)
Biao Li, Univ. at Albany (United States)
Robert E. Geer, Univ. at Albany (United States)
Bai Xu, Univ. at Albany (United States)
James Castracane, Univ. at Albany (United States)
Fulong Dai, Tsinghua Univ. (China)


Published in SPIE Proceedings Vol. 5058:
Optical Technology and Image Processing for Fluids and Solids Diagnostics 2002
Gong Xin Shen; Soyoung S. Cha; Fu-Pen Chiang; Carolyn R. Mercer, Editor(s)

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