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Proceedings Paper

Laser-induced etched grating on InP for integrated optical circuit elements
Author(s): Haim Grebel; P. Pien
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Paper Abstract

Based on a non-linear coupling between the etchant species and the photo-induced carriers during photo-electrochemical etching of semiconductor surfaces, we propose that the reaction residue, the oxide layer, regulates the reaction.

Paper Details

Date Published: 1 December 1991
PDF: 7 pages
Proc. SPIE 1583, Integrated Optical Circuits, (1 December 1991); doi: 10.1117/12.50910
Show Author Affiliations
Haim Grebel, New Jersey Institute of Technology (United States)
P. Pien, New Jersey Institute of Technology (United States)

Published in SPIE Proceedings Vol. 1583:
Integrated Optical Circuits
Ka Kha Wong, Editor(s)

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