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Proceedings Paper

Some topics in surface and nanometrology
Author(s): David J. Whitehouse
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Paper Abstract

Some problems associated with surface metrology instrumentation and theory are discussed. In particular problems in Nanometrology are highlighted with reference to Markov processes and fractal analysis. A systems approach to surface characterization is suggested.

Paper Details

Date Published: 30 May 2003
PDF: 16 pages
Proc. SPIE 5144, Optical Measurement Systems for Industrial Inspection III, (30 May 2003); doi: 10.1117/12.508362
Show Author Affiliations
David J. Whitehouse, Univ. of Warwick (United Kingdom)


Published in SPIE Proceedings Vol. 5144:
Optical Measurement Systems for Industrial Inspection III
Wolfgang Osten; Malgorzata Kujawinska; Katherine Creath, Editor(s)

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