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Proceedings Paper

Photo-induced surface relief on Azo polymer for optical component fabrication
Author(s): Takashi Fukuda; Chang-Dae Keum; Hiro Matsuda; Kiyoshi Yase; Kaoru Tamada
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Paper Abstract

With respect to the manufacturing of optical elements, facile and effective fabrication method is proposed. It is developed in connection with photo-induced surface relief (PSR)formation phenomenon that occurs on the azobenzene functionalized polymer film. Purely optically inscribed surface relief structures have been used as a plastic mold for manufacturing of its replica. At least a hundred times replication process has been achieved using thermosetting resin without any deterioration. This method has many merits not only from a technical viewpoint but also from a economical efficiency. In this report,first the PSR phenomenon is explained and then several examples for optical component fabrication are demonstrated.

Paper Details

Date Published: 3 November 2003
PDF: 8 pages
Proc. SPIE 5183, Lithographic and Micromachining Techniques for Optical Component Fabrication II, (3 November 2003); doi: 10.1117/12.508289
Show Author Affiliations
Takashi Fukuda, National Institute of Advanced Industrial Science and Technology (Japan)
Chang-Dae Keum, National Institute of Advanced Industrial Science and Technology (Japan)
Hiro Matsuda, National Institute of Advanced Industrial Science and Technology (Japan)
Kiyoshi Yase, National Institute of Advanced Industrial Science and Technology (Japan)
Kaoru Tamada, National Institute of Advanced Industrial Science and Technology (Japan)


Published in SPIE Proceedings Vol. 5183:
Lithographic and Micromachining Techniques for Optical Component Fabrication II
Ernst-Bernhard Kley; Hans Peter Herzig, Editor(s)

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