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Proceedings Paper

Hybrid inorganic-organic aqueous base compatible waveguide materials for optical interconnect applications
Author(s): Matthew L. Moynihan; Craig Allen; Tuan Ho; Luke Little; Nathan Pawlowski; Nick Pugliano; James G. Shelnut; Bruno Sicard; Hai Bin Zheng; Garo Khanarian
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Paper Abstract

There are a number of organic, inorganic, and hybrid inorganic waveguide materials that are currently being used for a wide variety of optical interconnect applications. Depending upon the approach, waveguide formation is performed using a combination of lithographic and/or reactive ion etch (RIE) techniques. Often the processes involved with waveguide formation require unique processing conditions, hazardous process chemicals, and specialized pieces of capital equipment. In addition, many of the materials have been optimized for silicon substrates but are not compatible with printed wire board (PWB) substrates and processes. We have developed compositions and processes suitable for the creation of optical, planar waveguides on both silicon and PWB substrates. Based on silicate technology, these compositions use lithographic techniques to define waveguides, including aqueous, alkaline development. The resulting planar waveguides take advantage of the glass-like nature of silicate chemistry wedded with the simplicity of standard lithographic processes. Attenuation at typical wavelengths has been found to compete well with the non-silicate-based technologies available today. Single-mode (SM) and multi-mode (MM) waveguides with losses ranging from 0.6 dB/cm @ 1550nm, 0.2 dB/cm @1320nm, and <0.1 @ 850nm are feasible. Composition, process, and physical properties such as optical, thermal and mechanical properties will be discussed.

Paper Details

Date Published: 10 November 2003
PDF: 11 pages
Proc. SPIE 5212, Linear and Nonlinear Optics of Organic Materials III, (10 November 2003); doi: 10.1117/12.508142
Show Author Affiliations
Matthew L. Moynihan, Shipley Co. L.L.C. (United States)
Craig Allen, Shipley Co. L.L.C. (United States)
Tuan Ho, Shipley Co. L.L.C. (United States)
Luke Little, Shipley Co. L.L.C. (United States)
Nathan Pawlowski, Shipley Co. L.L.C. (United States)
Nick Pugliano, Shipley Co. L.L.C. (United States)
James G. Shelnut, Shipley Co. L.L.C. (United States)
Bruno Sicard, Shipley Co. L.L.C. (United States)
Hai Bin Zheng, Shipley Co. L.L.C. (United States)
Garo Khanarian, Rohm and Haas Co. (United States)

Published in SPIE Proceedings Vol. 5212:
Linear and Nonlinear Optics of Organic Materials III
Mark G. Kuzyk; Manfred Eich; Robert A. Norwood, Editor(s)

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