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Proceedings Paper

Miniature interferometers for applications in microtechnology and nanotechnology
Author(s): Gerd Jager; Eberhard Manske; Tino Hausotte; Roland Fußl; Rainer Grunwald; Hans Buchner; Walter Schott; Denys Dontsov
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Paper Abstract

An initial description of the design and operation of compact miniature interferometers that employ fiberoptic lightguides for all of their optical couplings and are suitable for general-purpose use is followed by a metrological analysis of their mode of operation and examples of their broad applicability, based on several typical instrumental setups.

Paper Details

Date Published: 20 November 2003
PDF: 8 pages
Proc. SPIE 5190, Recent Developments in Traceable Dimensional Measurements II, (20 November 2003); doi: 10.1117/12.507906
Show Author Affiliations
Gerd Jager, Technische Univ. Ilmenau (Germany)
Eberhard Manske, Technische Univ. Ilmenau (Germany)
Tino Hausotte, Technische Univ. Ilmenau (Germany)
Roland Fußl, Technische Univ. Ilmenau (Germany)
Rainer Grunwald, Technische Univ. Ilmenau (Germany)
Hans Buchner, Technische Univ. Ilmenau (Germany)
Walter Schott, SIOS Messtechnik GmbH (Germany)
Denys Dontsov, SIOS Messtechnik GmbH (Germany)


Published in SPIE Proceedings Vol. 5190:
Recent Developments in Traceable Dimensional Measurements II
Jennifer E. Decker; Nicholas Brown, Editor(s)

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