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Proceedings Paper

Wafer-scale micro-optics replication technology
Author(s): Markus Rossi; Hartmut Rudmann; Brigitte Marty; Andreas Maciossek
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Paper Abstract

For many high-volume applications of micro-optical elements and systems the most cost-effective fabrication technology is replication in polymer materials with techniques such as UV embossing, hot embossing, and injection molding. Replication significantly reduces the cost in volume production in comparison to silicon-based etched components. However, the temperature and humidity stability of most commercial polymers is not suitable for the application of replicated elements in areas such as telecom or datacom. A process based on UV-replication in chemically durable polymers has been developed. Technologies for all fabrication steps from mastering over tooling to replication on wafer-scale, post-processing and characterization are described. We present results of various projects with double-sided micro-optics for telecom/datacom and various sensor applications.

Paper Details

Date Published: 3 November 2003
PDF: 7 pages
Proc. SPIE 5183, Lithographic and Micromachining Techniques for Optical Component Fabrication II, (3 November 2003); doi: 10.1117/12.507769
Show Author Affiliations
Markus Rossi, Heptagon (Switzerland)
Hartmut Rudmann, Heptagon (Switzerland)
Brigitte Marty, Heptagon (Switzerland)
Andreas Maciossek, Heptagon (Switzerland)


Published in SPIE Proceedings Vol. 5183:
Lithographic and Micromachining Techniques for Optical Component Fabrication II
Ernst-Bernhard Kley; Hans Peter Herzig, Editor(s)

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