Share Email Print

Proceedings Paper

Replication technology for micro-optics and optical microsystems
Author(s): Michael T. Gale
Format Member Price Non-Member Price
PDF $14.40 $18.00
cover GOOD NEWS! Your organization subscribes to the SPIE Digital Library. You may be able to download this paper for free. Check Access

Paper Abstract

Replication technology is playing an increasingly important role in the production of micro-optical elements and systems. Hot embossing, injection moulding and uv-embossing all can produce high quality optical elements in very cost-effective processes. The development of wafer scale replication technology using uv-curable sol-gel and polymer materials enables refractive and diffractive micro-optical elements to be replicated directly onto glass substrates or onto Si or III-V device wafers. New sol-gel materials allow the combination of replication with lithography to leave selected areas material-free for sawing and bonding. The technology is suitable for the production of both planar micro-optical elements and stacked optical microsystems. Replication techniques are inherently of very high resolution, so that optical nanostructures such as subwavelength structures can also be produced by the same technologies. Grating nanostructures with linewidths less than 100 nm have been replicated into polymer and sol-gel materials for the cost-effective fabrication of large area subwavelength structures for applications such as anti-reflection surfaces, polarisers and certain types of resonant filters.

Paper Details

Date Published: 10 November 2003
PDF: 8 pages
Proc. SPIE 5177, Gradient Index, Miniature, and Diffractive Optical Systems III, (10 November 2003); doi: 10.1117/12.507666
Show Author Affiliations
Michael T. Gale, Ctr. Suisse d'Electronique et de Microtechnique (Switzerland)

Published in SPIE Proceedings Vol. 5177:
Gradient Index, Miniature, and Diffractive Optical Systems III
Thomas J. Suleski, Editor(s)

© SPIE. Terms of Use
Back to Top