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Proceedings Paper

Submicroradian error sources in pencil beam interferometry
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Paper Abstract

As requirements for surface slope errors in synchrotron radiation beam line optics approach the 100 nrad level on a routine basis, it becomes necessary to improve the performance of metrology instrumentation to provide reliable, repeatable, and accurate measurements at this level. We have identified a number of internal error sources in the Long Trace Profiler (LTP) that affect measurement quality at this level. The LTP is sensitive to phase shifts produced within the millimeter diameter of the pencil beam probe by optical path irregularities with scale lengths on the order of a millimeter. We examine the effects of mirror surface "macroroughness" and internal glass homogeneity on the accuracy of the LTP through experiment and theoretical modeling. By careful characterization and selection of the quality of the optical components that comprise the LTP optical system, it is possible to reduce the systematic errors in the measurement to well below the 1 microradian level.

Paper Details

Date Published: 22 December 2003
PDF: 8 pages
Proc. SPIE 5180, Optical Manufacturing and Testing V, (22 December 2003); doi: 10.1117/12.507465
Show Author Affiliations
Peter Z. Takacs, Brookhaven National Lab. (United States)
Shinan Qian, Brookhaven National Lab. (United States)

Published in SPIE Proceedings Vol. 5180:
Optical Manufacturing and Testing V
H. Philip Stahl, Editor(s)

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