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Proceedings Paper

Focusing properties of x-ray polymer refractive lenses from SU-8 resist layer
Author(s): Anatoly A. Snigirev; Irina Snigireva; Michael Drakopoulos; Vladimir Nazmov; Elena Reznikova; Sergey Kuznetsov; Maxim Grigoriev; Jurgen Mohr; Volker Saile
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Paper Abstract

Compound refractive lenses printed in Al and Be are becoming the key X-ray focusing and imaging components of beamline optical layouts at the 3rd generation synchrotron radiation sources. Recently proposed planar optical elements based on Si, diamond etc. may substantially broaden the spectrum of the refractive optics applicability. Planar optics has focal distances ranging from millimeters to tens of meters offering nano- and micro-focusing lenses, as well as beam condensers and collimators. Here we promote deep X-ray lithography and LIGA-type techniques to create high aspect-ratio lens structures for different optical geometries. Planar X-ray refractive lenses were manufactured in 1 mm thick SU-8 negative resist layer by means of deep synchrotron radiation lithography. The focusing properties of lenses were studied at ID18F and BM5 beamlines at the ESRF using monochromatic radiation in the energy range of 10 - 25 keV. By optimizing lens layout, mask making and resist processing, lenses of good quality were fabricated. The resolution of about 270 nm (FWHM) with gain in the order of 300 was measured at 14 keV. In-line holography of B-fiber was realized in imaging and projection mode with a magnification of 3 and 20, respectively. Submicron features of the fiber were clearly resolved. A radiation stability test proved that the fabricated lenses don't change focusing characteristics after dose of absorbed X-ray radiation of about 2 MJ/cm3. The unique radiation stability along with the high effficiency of SU8 lenses opens wide range of their synchrotron radiation applications such as microfocusing elements, condensers and collimators.

Paper Details

Date Published: 23 December 2003
PDF: 11 pages
Proc. SPIE 5195, Crystals, Multilayers, and Other Synchrotron Optics, (23 December 2003); doi: 10.1117/12.507111
Show Author Affiliations
Anatoly A. Snigirev, European Synchrotron Radiation Facility (France)
Irina Snigireva, European Synchrotron Radiation Facility (France)
Michael Drakopoulos, European Synchrotron Radiation Facility (France)
Vladimir Nazmov, Forschungszentrum Karlsruhe GmbH (Germany)
Elena Reznikova, Forschungszentrum Karlsruhe GmbH (Germany)
Sergey Kuznetsov, Institute of Microelectronics Technology and High Purity Materials (Russia)
Maxim Grigoriev, Institute of Microelectronics Technology and High Purity Materials (Russia)
Jurgen Mohr, Forschungszentrum Karlsruhe GmbH (Germany)
Volker Saile, Forschungszentrum Karlsruhe GmbH (Germany)

Published in SPIE Proceedings Vol. 5195:
Crystals, Multilayers, and Other Synchrotron Optics
Tetsuya Ishikawa; Albert T. Macrander; James L. Wood, Editor(s)

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