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Proceedings Paper

Point-diffraction interferometer for 3D profile measurement of rough surfaces
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Paper Abstract

We present a point-diffraction interferometer specially devised for the profile measurement of rough surfaces that are difficult to be measured with conventional two-arm interferometers. The diffraction interferometer comprises multiple two-point-diffraction sources made of a pair of single-mode optical fibers, and performs an absolute profile measurement by projecting multiple fringe patterns on the object surface and then fitting measured phase data into a global geometrical model of multilateration. Test measurement results demonstrate that the proposed point-diffraction interferometer is well suited for the warpage inspection of microelectronics components with excessive height irregularities, such as unpolished backsides of silicon wafers and plastic molds of integrated-circuit chip packages.

Paper Details

Date Published: 10 November 2003
PDF: 8 pages
Proc. SPIE 5191, Optical Diagnostics for Fluids, Solids, and Combustion II, (10 November 2003); doi: 10.1117/12.507074
Show Author Affiliations
Seung-Woo Kim, Korea Advanced Institute of Science and Technology (South Korea)
Byoung-Chang Kim, Korea Advanced Institute of Science and Technology (South Korea)


Published in SPIE Proceedings Vol. 5191:
Optical Diagnostics for Fluids, Solids, and Combustion II
Patrick V. Farrell; Fu-Pen Chiang; Carolyn R. Mercer; Gongxin Shen, Editor(s)

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