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Proceedings Paper

Focusing properties of silicon refractive lenses: comparison of experimental results with the computer simulation
Author(s): Irina Snigireva; Vecheslav Yunkin; Sergey Kuznetsov; Maxim Grigoriev; Marina Chukalina; Leonid Shabel'nikov; Anatoly A. Snigirev; Martin Hoffmann; Edgar Voges
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Paper Abstract

Focusing properties of Si planar refractive lenses including experimental tests and theoretical analysis have been studied. Computer simulations of the X-ray wave field distribution near the focal plane have been performed for different lens designs. Comparison of the experimental results with the computer simulation allows establishing the reasons for deviation of focusing from ideal performance. The deviation of the lens vertical sidewall profile was minimized by additional correction in the lens design and special efforts in optimization of etching process. Optimized lenses were manufactured, tested at the ESRF and brought out the dramatic enhancement in focusing properties.

Paper Details

Date Published: 23 December 2003
PDF: 8 pages
Proc. SPIE 5195, Crystals, Multilayers, and Other Synchrotron Optics, (23 December 2003); doi: 10.1117/12.507070
Show Author Affiliations
Irina Snigireva, European Synchrotron Radiation Facility (France)
Vecheslav Yunkin, Institute of Microelectronics Technology and High Purity Materials (Russia)
Sergey Kuznetsov, Institute of Microelectronics Technology and High Purity Materials (Russia)
Maxim Grigoriev, Institute of Microelectronics Technology and High Purity Materials (Russia)
Marina Chukalina, Institute of Microelectronics Technology and High Purity Materials (Russia)
Leonid Shabel'nikov, Institute of Microelectronics Technology and High Purity Materials (Russia)
Anatoly A. Snigirev, European Synchrotron Radiation Facility (France)
Martin Hoffmann, Univ. Dortmund (Germany)
Edgar Voges, Univ. Dortmund (Germany)


Published in SPIE Proceedings Vol. 5195:
Crystals, Multilayers, and Other Synchrotron Optics
Tetsuya Ishikawa; Albert T. Macrander; James L. Wood, Editor(s)

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