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Proceedings Paper

Surface micromachining and characterization of pyroelectric infrared ray focal plane array utilizing Pb(Zr0.3Ti0.7)O3 thin films
Author(s): Sang-Ouk Ryu; Seong-Mok Cho; In-Kyu You; Sung-Min Yoon; Kwi-Dong Kim; Byoung-Gon Yu
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Paper Abstract

We have developed surface micromachined Infrared ray (IR) focal plane array (FPA), in which single SiO2 layer works as an IR absorbing plate and Pb(Zr0.3Ti0.7)O3 thin film served as a thermally sensitive material. There are some advantages of applying SiO2 layer as an IR absorbing layer. First of all, the SiO2 has good IR absorbance within 8 ~ 12 μm spectrum range. Measured value showed about 60% absorbance of incident IR spectrum in the range. SiO2 layer has another important merit when applied to the top of Pt/PZT/Pt stack because it works also as a supporting membrane. Consequently, the IR absorbing layer forms one body with membrane structure, which simplifies the whole MEMS process and gives robustness to the structure.

Paper Details

Date Published: 8 December 2003
PDF: 8 pages
Proc. SPIE 5209, Materials for Infrared Detectors III, (8 December 2003); doi: 10.1117/12.507058
Show Author Affiliations
Sang-Ouk Ryu, Electronics and Telecommunications Research Institute (South Korea)
Seong-Mok Cho, Electronics and Telecommunications Research Institute (South Korea)
In-Kyu You, Electronics and Telecommunications Research Institute (South Korea)
Sung-Min Yoon, Electronics and Telecommunications Research Institute (South Korea)
Kwi-Dong Kim, Electronics and Telecommunications Research Institute (South Korea)
Byoung-Gon Yu, Electronics and Telecommunications Research Institute (South Korea)


Published in SPIE Proceedings Vol. 5209:
Materials for Infrared Detectors III
Randolph E. Longshore; Sivalingam Sivananthan, Editor(s)

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