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Proceedings Paper

Ring-coded halftone masks for the fabrication of circular micro-optical elements
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Paper Abstract

A new alternative coding method is proposed for the fabrication of circular diffractive optical elements with half tone masks, in which a series of rings with variant widths are used to produce desired gray distribution. Analytical analysis of this coding method is given and illustrated with numerical simulation examples.

Paper Details

Date Published: 3 November 2003
PDF: 8 pages
Proc. SPIE 5183, Lithographic and Micromachining Techniques for Optical Component Fabrication II, (3 November 2003); doi: 10.1117/12.507028
Show Author Affiliations
Changtao Wang, Institute of Optics and Electronics (China)
Chunlei Du, Institute of Optics and Electronics (China)


Published in SPIE Proceedings Vol. 5183:
Lithographic and Micromachining Techniques for Optical Component Fabrication II
Ernst-Bernhard Kley; Hans Peter Herzig, Editor(s)

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