Share Email Print
cover

Proceedings Paper

Recent activities at PTB nanometer comparator
Author(s): Jens Flugge; Rainer Koning; Harald Bosse
Format Member Price Non-Member Price
PDF $17.00 $21.00
cover GOOD NEWS! Your organization subscribes to the SPIE Digital Library. You may be able to download this paper for free. Check Access

Paper Abstract

The PTB in cooperation with the Dr. Johannes Heidenhain GmbH built up a new length comparator with a measurement range of 610 mm for 1D length measurements on line scales, linear encoders and interferometers. The PTB nanometer comparator was retrofitted and now allows a stable operation of the interferometer. To investigate the actual measurement performance a few line scales and a linear encoder were measured and compared with results from other comparators. The results are discussed and recent developments at the nanometer comparator are described.

Paper Details

Date Published: 20 November 2003
PDF: 9 pages
Proc. SPIE 5190, Recent Developments in Traceable Dimensional Measurements II, (20 November 2003); doi: 10.1117/12.506908
Show Author Affiliations
Jens Flugge, Physikalisch-Technische Bundesanstalt (Germany)
Rainer Koning, Physikalisch-Technische Bundesanstalt (Germany)
Harald Bosse, Physikalisch-Technische Bundesanstalt (Germany)


Published in SPIE Proceedings Vol. 5190:
Recent Developments in Traceable Dimensional Measurements II
Jennifer E. Decker; Nicholas Brown, Editor(s)

© SPIE. Terms of Use
Back to Top