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Proceedings Paper

Recent activities at PTB nanometer comparator
Author(s): Jens Flugge; Rainer Koning; Harald Bosse
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Paper Abstract

The PTB in cooperation with the Dr. Johannes Heidenhain GmbH built up a new length comparator with a measurement range of 610 mm for 1D length measurements on line scales, linear encoders and interferometers. The PTB nanometer comparator was retrofitted and now allows a stable operation of the interferometer. To investigate the actual measurement performance a few line scales and a linear encoder were measured and compared with results from other comparators. The results are discussed and recent developments at the nanometer comparator are described.

Paper Details

Date Published: 20 November 2003
PDF: 9 pages
Proc. SPIE 5190, Recent Developments in Traceable Dimensional Measurements II, (20 November 2003); doi: 10.1117/12.506908
Show Author Affiliations
Jens Flugge, Physikalisch-Technische Bundesanstalt (Germany)
Rainer Koning, Physikalisch-Technische Bundesanstalt (Germany)
Harald Bosse, Physikalisch-Technische Bundesanstalt (Germany)

Published in SPIE Proceedings Vol. 5190:
Recent Developments in Traceable Dimensional Measurements II
Jennifer E. Decker; Nicholas Brown, Editor(s)

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