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Proceedings Paper

Economic state of the industry
Author(s): Gerald Dan Hutcheson
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Proc. SPIE 5041, Process and Materials Characterization and Diagnostics in IC Manufacturing, ; doi: 10.1117/12.506873
Show Author Affiliations
Gerald Dan Hutcheson, VLSI Research, Inc. (United States)


Published in SPIE Proceedings Vol. 5041:
Process and Materials Characterization and Diagnostics in IC Manufacturing
Kenneth W. Tobin; Iraj Emami, Editor(s)

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