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Proceedings Paper

Image detection system for 157 nm using fluorescent glass
Author(s): Yukitoshi Otani; Masakatsu Takahashi; Lianhua Jin; Hiroyuki Kowa; Norihiro Umeda
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Paper Abstract

An image detection system for vacuum ultra-violet region used a F2 laser (157nm) as a light source is proposed. A fluorescent glass (LUMILASS-G9) is employed to convert UV light into visible light. Characteristics of fluorescent glass are studied. Some beam profiles of F2 laser are analyzed as a demonstration of the imaging detection. A VUV interferometer is proposed.

Paper Details

Date Published: 4 November 2003
PDF: 4 pages
Proc. SPIE 5188, Advanced Characterization Techniques for Optics, Semiconductors, and Nanotechnologies, (4 November 2003); doi: 10.1117/12.506755
Show Author Affiliations
Yukitoshi Otani, Tokyo Univ. of Agriculture and Technology (Japan)
Masakatsu Takahashi, Tokyo Univ. of Agriculture and Technology (Japan)
Lianhua Jin, Tokyo Univ. of Agriculture and Technology (Japan)
Hiroyuki Kowa, Uniopt Co., Ltd. (Japan)
Norihiro Umeda, Tokyo Univ. of Agriculture and Technology (United States)


Published in SPIE Proceedings Vol. 5188:
Advanced Characterization Techniques for Optics, Semiconductors, and Nanotechnologies
Angela Duparre; Bhanwar Singh, Editor(s)

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