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Proceedings Paper

Microreflective elements for integrated planar optics interconnects
Author(s): Yunlong Sheng; Claude A. Delisle; Louis M. Moreau; Li Song; Roger A. Lessard; Henri H. Arsenault
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Paper Abstract

Binary optics reflective gratings and micro mirrors are studied for integrated planar optical interconnect applications. The staircase profile surface relief gratings have high efficiency at small diffraction angles. The micro mirrors provide larger deflection angles. Fabrication of both elements is discussed and experimented on a photoresist layer.

Paper Details

Date Published: 1 December 1991
PDF: 7 pages
Proc. SPIE 1559, Photopolymer Device Physics, Chemistry, and Applications II, (1 December 1991); doi: 10.1117/12.50672
Show Author Affiliations
Yunlong Sheng, Ctr. d'Optique, Photonique, et Laser/Univ. Laval (Canada)
Claude A. Delisle, Ctr. d'Optique, Photonique, et Laser/Univ. Laval (Canada)
Louis M. Moreau, Ctr. d'Optique, Photonique, et Laser/Univ. Laval (Canada)
Li Song, Ctr. d'Optique, Photonique, et Laser/Univ. Laval (Canada)
Roger A. Lessard, Ctr. d'Optique, Photonique, et Laser/Univ. Laval (Canada)
Henri H. Arsenault, Ctr. d'Optique, Photonique, et Laser/Univ. Laval (Canada)


Published in SPIE Proceedings Vol. 1559:
Photopolymer Device Physics, Chemistry, and Applications II
Roger A. Lessard, Editor(s)

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