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Proceedings Paper

Stiction problems in releasing 3D microstructures and the solution
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Paper Abstract

Micro-stereolithography (μSL) is capable of fabrication of highly complex three-dimensional (3D) microstructures by selectively photo-induced polymerization from the monomer resin. However, during the evaporative drying of structures from liquid resin, the 3D microstructures often collapse due to the capillary force. In this work, a theoretical model is developed to analyze the deflection and adhesion between thin polymer beams under capillary force. The detachment length of the test structures and adhesion energy of a typical μSL polymer (HDDA) are obtained experimentally which are important for MEMS structure design. Finally, we successfully developed a sublimation process to release the 3D microstructures without the adhesion.

Paper Details

Date Published: 20 October 2003
PDF: 9 pages
Proc. SPIE 5225, Nano- and Micro-Optics for Information Systems, (20 October 2003); doi: 10.1117/12.506644
Show Author Affiliations
Dongmin Wu, Univ. of California, Los Angeles (United States)
Nicholas Fang, Univ. of California, Los Angeles (United States)
Cheng Sun, Univ. of California, Los Angeles (United States)
Xiang Zhang, Univ. of California, Los Angeles (United States)


Published in SPIE Proceedings Vol. 5225:
Nano- and Micro-Optics for Information Systems
Louay A. Eldada, Editor(s)

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