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Proceedings Paper

Direct nanostructuring of materials with intense coherent XUV radiation
Author(s): Libor Juha; Jacek Krzywinski; Bedrich Rus
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Proc. SPIE 5220, Nanofabrication Technologies, ; doi: 10.1117/12.506454
Show Author Affiliations
Libor Juha, Institute of Physics (Czech Republic)
HASYLAB/DESY, Hamburg (Germany)
Jacek Krzywinski, Institute of Physics (Poland)
HASYLAB/DESY, Hamburg (Germany)
Bedrich Rus, Institute of Physics (Czech Republic)


Published in SPIE Proceedings Vol. 5220:
Nanofabrication Technologies
Elizabeth A. Dobisz, Editor(s)

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