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Proceedings Paper

Optimal instrument control strategy for an actuator system with 1-angstrom closed-loop positioning resolution
Author(s): Yufeng Han; Thomas Wong; Deming Shu
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Paper Abstract

An optimal instrument control strategy for a dual-stage actuator system is presented. Resolution extension by signal conditioning and digital averaging techniques was implemented during the instrument design. The motion controller was developed based on robust PID (proportional-integral-derivative) algorithm and coarse/fine relay mechanism. The closed-loop residual noise and optimal dynamic performance are demonstrated by experiments.

Paper Details

Date Published: 27 October 2003
PDF: 9 pages
Proc. SPIE 5176, Optomechanics 2003, (27 October 2003); doi: 10.1117/12.506394
Show Author Affiliations
Yufeng Han, Argonne National Lab. (United States)
Illinois Institute of Technology (United States)
Thomas Wong, Illinois Institute of Technology (United States)
Deming Shu, Argonne National Lab. (United States)


Published in SPIE Proceedings Vol. 5176:
Optomechanics 2003
Alson E. Hatheway, Editor(s)

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