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Proceedings Paper

Nanoprecision mechanical fabrication for optical elements
Author(s): Hitoshi Ohmori; Kazutoshi Katahira; Y. Watanabe; Weimin Lin; Yutang Dai; Takanori Suzuki; Y. Uehara
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Paper Abstract

Through advanced research activities on ultra/nanoprecision and high-quality surface machining processes, required for the fabrication of advanced functional devices, we launched the research and development of a new field of nanoprecision mechanical fabrication technologies for optical elements together with on-machine measurement and evaluation techniques, aiming at a wide variety of materials, and precision and scale ranging from micrometer to nanometer level, to meet scientific, practical and applied industrial needs. This paper introduces their activities for optical elements.

Paper Details

Date Published: 8 May 2003
PDF: 4 pages
Proc. SPIE TD02, Optifab 2003, (8 May 2003); doi: 10.1117/12.506339
Show Author Affiliations
Hitoshi Ohmori, RIKEN-The Institute of Physical and Chemical Research (Japan)
Kazutoshi Katahira, RIKEN-The Institute of Physical and Chemical Research (Japan)
Y. Watanabe, RIKEN-The Institute of Physical and Chemical Research (Japan)
Weimin Lin, RIKEN-The Institute of Physical and Chemical Research (Japan)
Yutang Dai, RIKEN-The Institute of Physical and Chemical Research (Japan)
Takanori Suzuki, RIKEN-The Institute of Physical and Chemical Research (Japan)
Y. Uehara, RIKEN-The Institute of Physical and Chemical Research (Japan)


Published in SPIE Proceedings Vol. TD02:
Optifab 2003
Walter C. Czajkowski; Toshihide Dohi; Hans Lauth; Harvey M. Pollicove, Editor(s)

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