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Proceedings Paper

Process error limitations on binary optics performance
Author(s): J. Allen Cox; Bernard S. Fritz; Thomas R. Werner
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Paper Abstract

We present results characterizing the effects of processing errors on the performance of staircase kinoforms, commonly known as `binary optical devices.' Diffraction efficiency and modulation transfer function data are given for various types of processing errors present in staircase kinoforms of a f/10 Fresnel phase lens having two, four, and eight phase levels. Processing errors include etch depth, linewidth, and mask alignment. Processing errors, especially mask alignment, are shown to have the greatest impact on diffraction efficiency and very little effect on image quality.

Paper Details

Date Published: 1 December 1991
PDF: 9 pages
Proc. SPIE 1555, Computer and Optically Generated Holographic Optics; 4th in a Series, (1 December 1991); doi: 10.1117/12.50623
Show Author Affiliations
J. Allen Cox, Honeywell Systems and Research Ctr. (United States)
Bernard S. Fritz, Honeywell Systems and Research Ctr. (United States)
Thomas R. Werner, Honeywell Systems and Research Ctr. (United States)


Published in SPIE Proceedings Vol. 1555:
Computer and Optically Generated Holographic Optics; 4th in a Series
Ivan Cindrich; Sing H. Lee, Editor(s)

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