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Proceedings Paper

CAD system for CGHs and laser beam lithography
Author(s): Toyohiko Yatagai; Martial Henri Geiser; Ronglong Tian; Xinkang Tian; Hajime Onda
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Paper Abstract

An interactive CAD system for a computer-generated hologram (CGH) is developed to produce many kinds of CGHs in the form of Postscript files, G-code files for NC machines, and HPGL files. These files can later be sent to a laser printer and also a laser beam lithography system. The laser beam lithography system developed has a writing area of 200 mmA approximately 200 mm with 0.5E m positional accuracy. By using the LBL system, some CGHs for optical interconnection and kinoforms are optimized with the simulated annealing algorithm.

Paper Details

Date Published: 1 December 1991
PDF: 5 pages
Proc. SPIE 1555, Computer and Optically Generated Holographic Optics; 4th in a Series, (1 December 1991); doi: 10.1117/12.50616
Show Author Affiliations
Toyohiko Yatagai, Univ. of Tsukuba (Japan)
Martial Henri Geiser, Univ. of Tsukuba (Japan)
Ronglong Tian, Univ. of Tsukuba (Japan)
Xinkang Tian, Univ. of Tsukuba (Japan)
Hajime Onda, NTN Co., Ltd. (Japan)

Published in SPIE Proceedings Vol. 1555:
Computer and Optically Generated Holographic Optics; 4th in a Series
Ivan Cindrich; Sing H. Lee, Editor(s)

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