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Proceedings Paper

Compact interferometer for micro-optic performance and shape characterization
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Paper Abstract

We have focused on measurement needs for micro-refractive lenses and have developed a flexible and compact micro-interferometer that can be used to measure lens radius of curvature and form errors. Transmitted wavefront and back focal length measurements can be easily added to the instrument. This instrument addresses measurement needs for micro refractive lenses. The interferometer is based on a Mitutoyo metallurgical microscope and operates with a 633 nm helium neon source. The radius of curvature measurement is directly traceable, meaning an external artifact is not required for calibration. This requires a careful mechanical design, a detailed alignment procedure with estimates of alignment uncertainties, and stage error motion characterization with estimates of uncertainties. The instrument can also be used to measure some diffractive components and mold form errors. We describe the instrument in this paper and discuss design goals and measurement specifications.

Paper Details

Date Published: 3 November 2003
PDF: 9 pages
Proc. SPIE 5183, Lithographic and Micromachining Techniques for Optical Component Fabrication II, (3 November 2003); doi: 10.1117/12.506052
Show Author Affiliations
Kate M. Medicus, Univ. of North Carolina/Charlotte (United States)
Devendra Karodkar, Univ. of North Carolina/Charlotte (United States)
Brent C. Bergner, Univ. of North Carolina/Charlotte (United States)
Neil Gardner, Univ. of North Carolina/Charlotte (United States)
Angela Davies, Univ. of North Carolina/Charlotte (United States)


Published in SPIE Proceedings Vol. 5183:
Lithographic and Micromachining Techniques for Optical Component Fabrication II
Ernst-Bernhard Kley; Hans Peter Herzig, Editor(s)

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