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Proceedings Paper

Considerations of optical microlens-array design for nano-MEMS-based optical switch arrays
Author(s): Shyh-Lin Tsao; Wen-Ming Cheng; Chin-Jen Lu
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Paper Abstract

In this paper, we introduced an optical switch MEMS with 32 I/O channels. A simple formula is given as a guideline for application in nano-MEMS mirror arrays in optical cross connects networks. Minimized MEMS optical switch cannot only be linked to standard fiber but also can be connected to any other nano-scale optical devices by our designed microlens. We consider the optical switch being scale down to nano-meter order including beam radius at waist 2 μm, the tilt angle of mirror is set as 0.1(rad), the width of nano-MEMS chip is below 1000nm and optical wavelength 1.55 μm by using our designed microlens arrays.

Paper Details

Date Published: 15 October 2003
PDF: 9 pages
Proc. SPIE 5220, Nanofabrication Technologies, (15 October 2003); doi: 10.1117/12.505783
Show Author Affiliations
Shyh-Lin Tsao, National Taiwan Normal Univ. (Taiwan)
Wen-Ming Cheng, National Taiwan Normal Univ. (Taiwan)
Chin-Jen Lu, Yuan Ze Univ. (China)

Published in SPIE Proceedings Vol. 5220:
Nanofabrication Technologies
Elizabeth A. Dobisz, Editor(s)

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