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Proceedings Paper

5-m measurement system for traceable measurements of tapes and rules
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Paper Abstract

Measurement uncertainty is an important topic for traceable measurements. Nevertheless not many literatures on the uncertainty of flatness measurements have been reported. In this paper, we report on this issue according to the Guide to the Expression fo Uncertainty in Measurements (GUM). First stability of the reference optical flat used in Fizeau interferometer is discussed analytically, numerically, and experimentally. Then other uncertainty sources in actual measurements are investigated. As a result the uncertainty of flatness measurement of a large aperture flatness interferometer made by National Metrology Institute of Japan is 1/77 wavelength.

Paper Details

Date Published: 20 November 2003
PDF: 12 pages
Proc. SPIE 5190, Recent Developments in Traceable Dimensional Measurements II, (20 November 2003); doi: 10.1117/12.505579
Show Author Affiliations
Tanfer Yandayan, Tubitak Ulusal Metroloji Enstitusu (Turkey)
Bulent Ozgur, Tubitak Ulusal Metroloji Enstitusu (Turkey)


Published in SPIE Proceedings Vol. 5190:
Recent Developments in Traceable Dimensional Measurements II
Jennifer E. Decker; Nicholas Brown, Editor(s)

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