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Proceedings Paper

Reliable determination of wavelength dependence of thin film refractive index
Author(s): Alexander V. Tikhonravov; Michael K. Trubetskov; Tatiana V. Amotchkina; Andrei A. Tikhonravov; Detlev Ristau; Stefan Gunster
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Paper Abstract

Depending on the choice of thin film models and measurement data used for the characterization analysis one can obtain essentially different characterization results. It is especially difficult to reliably determine refractive index wavelength dependencies in the case of low accuracy measurement data. We consider possible approaches aimed to improve a stability of refractive index determination. The ways of the verification of characterization results are also discussed. Practical examples used to illustrate the proposed approaches are connected with the most difficult case of the determination of the refractive indices of fluoride films in the VUV spectral region.

Paper Details

Date Published: 4 November 2003
PDF: 12 pages
Proc. SPIE 5188, Advanced Characterization Techniques for Optics, Semiconductors, and Nanotechnologies, (4 November 2003); doi: 10.1117/12.505554
Show Author Affiliations
Alexander V. Tikhonravov, Moscow State Univ. (Russia)
Michael K. Trubetskov, Moscow State Univ. (Russia)
Tatiana V. Amotchkina, Moscow State Univ. (Russia)
Andrei A. Tikhonravov, Moscow State Univ. (Russia)
Detlev Ristau, Laser Zentrum Hannover e.V. (Germany)
Stefan Gunster, Laser Zentrum Hannover e.V. (Germany)

Published in SPIE Proceedings Vol. 5188:
Advanced Characterization Techniques for Optics, Semiconductors, and Nanotechnologies
Angela Duparre; Bhanwar Singh, Editor(s)

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