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Proceedings Paper

Null test measurement of high-numerical-aperture cylindrical microlenses in transmitted light
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Paper Abstract

An interferometrical measurement method is presented for determining the quality of cylindrical micro lenses with a numerical aperture of up to 0.8 in transmitted light. In order to maximize the achievable accuracy, a null test configuration was chosen. The reference cylindrical waves are shaped by computer generated diffractive optical elements (DOEs), which are made by optical or e-beam lithography. The resulting wave front is analyzed by a fiber optic phase-shifting Mach-Zehnder-interferometer or a Shack-Hartmann wave front sensor. Besides the general setup, which is working in the near infrared (NIR), special aspects will be presented concerning the elimination of misalignment aberrations, the complete filtering of parasitic diffraction orders and the generation of an anamorphic optical transformation for increasing the lateral resolution perpendicular to the cylindrical axis. By means of experimental results the possibilities and accuracy of this technique are discussed.

Paper Details

Date Published: 22 December 2003
PDF: 8 pages
Proc. SPIE 5180, Optical Manufacturing and Testing V, (22 December 2003); doi: 10.1117/12.505547
Show Author Affiliations
Juergen Lamprecht, Friedrich-Alexander-Univ. Erlangen-Nuernberg (Germany)
Norbert Lindlein, Friedrich-Alexander-Univ. Erlangen-Nuernberg (Germany)
Johannes Schwider, Friedrich-Alexander-Univ. Erlangen-Nuernberg (Germany)

Published in SPIE Proceedings Vol. 5180:
Optical Manufacturing and Testing V
H. Philip Stahl, Editor(s)

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