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Proceedings Paper

Phase-shifting algorithm via wavelength tuning based on temporal Fourier transform
Author(s): Yingjie Yu; Benhao Zhang; Yunfang Jiao
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Paper Abstract

The phase-shifting algorithm via wavelength tuning based on temporal Fourier transform is according to the Fourier transform technique and the difference technique to realize the processing of the interferogram. This algorithm is applied to test some course profiles or the topography with high steps. The paper describes its main idea and presents the shortcoming of the algorithm proposed by Takeda. Then it puts forward the improved algorithml. The pape describes the realization processing and the errors of the new algorithm. Finally, it supplies the measurement result.

Paper Details

Date Published: 4 November 2003
PDF: 8 pages
Proc. SPIE 5188, Advanced Characterization Techniques for Optics, Semiconductors, and Nanotechnologies, (4 November 2003); doi: 10.1117/12.505523
Show Author Affiliations
Yingjie Yu, Shanghai Univ. (China)
Benhao Zhang, Shanghai Univ. (China)
Yunfang Jiao, Shanghai Univ. (China)


Published in SPIE Proceedings Vol. 5188:
Advanced Characterization Techniques for Optics, Semiconductors, and Nanotechnologies
Angela Duparre; Bhanwar Singh, Editor(s)

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