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Proceedings Paper

Lateral shearing interferometer using phase-shifting technique without moving element
Author(s): Jae Bong Song; Yoon Woo Lee; In Won Lee; Jung Hoon Lee
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Paper Abstract

A simple phase shifting (PS) technique without moving element in lateral shearing (LS) interferometer is presented. This method uses Murty’s simple LS interferometer with a wedge plate and adds only two identical transmission gratings. The two gratings can make three (or odd number of) equally separated identical test wavefronts. The wedge plate changes the optical path difference between the original wavefront and the sheared wavefront along the wedge direction. So three (or odd number of) interferograms having different phase shift quantity can be obtained simultaneously and 3-step PS interferometry algorithm can be applied.

Paper Details

Date Published: 22 December 2003
PDF: 10 pages
Proc. SPIE 5180, Optical Manufacturing and Testing V, (22 December 2003); doi: 10.1117/12.505396
Show Author Affiliations
Jae Bong Song, Korea Research Institute of Standards and Science (South Korea)
Yoon Woo Lee, Korea Research Institute of Standards and Science (South Korea)
In Won Lee, Korea Research Institute of Standards and Science (South Korea)
Jung Hoon Lee, Yeungnam Univ. (South Korea)


Published in SPIE Proceedings Vol. 5180:
Optical Manufacturing and Testing V
H. Philip Stahl, Editor(s)

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