Share Email Print

Proceedings Paper

Description and calibration of a fully automated infrared scatterometer
Author(s): Stephane Mainguy; Michel Olivier; Michel A. Josse; Michel Guidon
Format Member Price Non-Member Price
PDF $14.40 $18.00
cover GOOD NEWS! Your organization subscribes to the SPIE Digital Library. You may be able to download this paper for free. Check Access

Paper Abstract

A fully automated scatterometer, designed for BRDF measurements in the IR at about 10 micrometers , is described. Basically, it works around a reflecting parabola (464 mm diameter, F/0.25) and permits measurements in and out of the plane of incidence. Optical properties of the parabolic mirror are emphasized by a ray-tracing technique which permits determination of the correct illumination on the sample and detection conditions of scattered light. Advantages and drawbacks of such an instrument are discussed, as well as calibration procedures. As a conclusion, we present experimental results to illustrate the instrument capabilities.

Paper Details

Date Published: 1 December 1991
PDF: 14 pages
Proc. SPIE 1530, Optical Scatter: Applications, Measurement, and Theory, (1 December 1991); doi: 10.1117/12.50517
Show Author Affiliations
Stephane Mainguy, CEA/CESTA (France)
Michel Olivier, CEA/CESTA (France)
Michel A. Josse, CEA/CESTA (France)
Michel Guidon, CEA/CESTA (France)

Published in SPIE Proceedings Vol. 1530:
Optical Scatter: Applications, Measurement, and Theory
John C. Stover, Editor(s)

© SPIE. Terms of Use
Back to Top