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Proceedings Paper

Fabrication of micropyramid prism array with coding gray-tone mask method
Author(s): Qian Liu; Fuhua Gao; Feng Gao; Qingjun Peng; Yongkang Guo; Jun Yao
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Paper Abstract

An optimized coding gray-tone mask method with multi-parameters is presented in this paper. Precise calculations, which are performed on the dead area in the backward reflection of the pyramid prism, demonstrate that the fringe error caused by the coding gray-tone mask has little affect on the performance of the pyramid prisms. This not only greatly reduce the resolution requirement of the coding gray-tone mask, but also reduce the errors produced by the exposure process. A satisfying simulation result is obtained with the designed coding gray-tone mask.

Paper Details

Date Published: 3 November 2003
PDF: 7 pages
Proc. SPIE 5183, Lithographic and Micromachining Techniques for Optical Component Fabrication II, (3 November 2003); doi: 10.1117/12.505022
Show Author Affiliations
Qian Liu, Sichuan Univ. (China)
Fuhua Gao, Sichuan Univ. (China)
Feng Gao, Sichuan Univ. (China)
Qingjun Peng, Sichuan Univ. (China)
Yongkang Guo, Sichuan Univ. (China)
Jun Yao, Univ. of Strathclyde (United Kingdom)

Published in SPIE Proceedings Vol. 5183:
Lithographic and Micromachining Techniques for Optical Component Fabrication II
Ernst-Bernhard Kley; Hans Peter Herzig, Editor(s)

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