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Proceedings Paper

Structural parameter of color separating grating and its physical characteristics
Author(s): Fuhua Gao; Jianhua Zhu; Feng Gao; Jianli Liu; Yongkang Guo; Ziqiang Hu
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Paper Abstract

The CSG’s physical performance is decided by its structural parameters, such as width of grating stair, height of grating stair, and the shape of stair edge. Consideration of the practical fabrication process, an error model of CSG’s structure is built to express the relationship between CSG’s performance and its structural parameters. In this model, each structural parameter of CSG is expressed as a variable, and the structural parameter error induced by fabrication process is expressed as minute disturb of relative variable. Through analysis and simulation, we obtained a general estimation standard for the structural parameter errors of CSG, which provides a theoretical direction for CSG’s fabrication and usage.

Paper Details

Date Published: 3 November 2003
PDF: 7 pages
Proc. SPIE 5183, Lithographic and Micromachining Techniques for Optical Component Fabrication II, (3 November 2003); doi: 10.1117/12.505019
Show Author Affiliations
Fuhua Gao, Sichuan Univ. (China)
Jianhua Zhu, Sichuan Univ. (China)
Feng Gao, Sichuan Univ. (China)
Jianli Liu, Sichuan Univ. (China)
Yongkang Guo, Sichuan Univ. (China)
Ziqiang Hu, Yantai Univ. (China)


Published in SPIE Proceedings Vol. 5183:
Lithographic and Micromachining Techniques for Optical Component Fabrication II
Ernst-Bernhard Kley; Hans Peter Herzig, Editor(s)

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