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Proceedings Paper

Calibration of high-speed optical profiler
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Paper Abstract

Optical profilers that employ white-light interferometry (WLI) techniques are widely used in industry and research to map surface structures with precise sub-nanometer resolution. The accuracy, repeatability and consistency of these instruments depend mainly on the proper calibration of two parameters: the mean wavelength and the scanner speed. Equally important in industrial applications is high throughput of measuring devices; high throughput can be achieved by increasing the speed of the measurement, which in turn reduces the sampling rate of the interference signal. Again, exact calibration of the system is the key to obtaining accurate measurements. Our solution for calibrating the system involves inserting into the optical profiler a second, laser-based, reference signal interferometer that creates a primary length standard for calibration. This innovation allows for substantially improved performance and repeatability at different measurement speeds up to 100 microns per second and over an 8 millimeter scanning range.

Paper Details

Date Published: 22 December 2003
PDF: 10 pages
Proc. SPIE 5180, Optical Manufacturing and Testing V, (22 December 2003); doi: 10.1117/12.504930
Show Author Affiliations
Joanna Schmit, Veeco Instruments Inc. (United States)
Michael Krell, Veeco Instruments Inc. (United States)
Erik Novak, Veeco Instruments Inc. (United States)

Published in SPIE Proceedings Vol. 5180:
Optical Manufacturing and Testing V
H. Philip Stahl, Editor(s)

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