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Proceedings Paper

Polishing robot based on FJP with in situ monitoring system
Author(s): Hedser van Brug; Michiel Dorrepaal; Ian Saunders
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Paper Abstract

A polishing robot, using the fluid jet polishing technique (FJP), in combination with in-situ monitoring systems will be presented. One of the monitoring systems is used to check the surface roughness, while the other checks the local removal. Owing to this removal monitoring system the presented system is ideally suited for corrective polishing applications where normally a time consuming iterative approach would be required.

Paper Details

Date Published: 22 December 2003
PDF: 6 pages
Proc. SPIE 5180, Optical Manufacturing and Testing V, (22 December 2003); doi: 10.1117/12.504739
Show Author Affiliations
Hedser van Brug, TNO TPD (Netherlands)
Michiel Dorrepaal, TNO TPD (Netherlands)
Ian Saunders, TNO TPD (Netherlands)


Published in SPIE Proceedings Vol. 5180:
Optical Manufacturing and Testing V
H. Philip Stahl, Editor(s)

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