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Proceedings Paper

Measurement of the refractive index and thermo-optic coefficient of water near 193 nm
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Paper Abstract

We discuss our approaches for measuring the absolute index (n), and its dependencies on wavelength (dn/dλ) and temperature (dn/dT), of high-purity water for wavelengths near 193 nm, using the minimum deviation prism method and an interferometric technique. We present preliminary results for these quantities measured by the minimum deviation method.

Paper Details

Date Published: 26 June 2003
PDF: 8 pages
Proc. SPIE 5040, Optical Microlithography XVI, (26 June 2003); doi: 10.1117/12.504601
Show Author Affiliations
John H. Burnett, National Institute of Standards and Technology (United States)
Simon Kaplan, National Institute of Standards and Technology (United States)


Published in SPIE Proceedings Vol. 5040:
Optical Microlithography XVI
Anthony Yen, Editor(s)

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