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Proceedings Paper

Micro-optical element on SiN membrane
Author(s): Jenq Yang Chang; Yu Cheng Chang; Chien Chieh Lee; Chi Ming Wang
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Paper Abstract

Optical elements, such as grating, holographic optical element and Fresnel lens, are made on the SiN membrane. The SiN film was deposited on the silicon wafer by low pressure chemical vapor deposition (LPCVD). Its advantages include the high transmission efficiency, light weight, and easy packaging for the Si-based optical pickup head.

Paper Details

Date Published: 3 November 2003
PDF: 10 pages
Proc. SPIE 5183, Lithographic and Micromachining Techniques for Optical Component Fabrication II, (3 November 2003); doi: 10.1117/12.504415
Show Author Affiliations
Jenq Yang Chang, National Central Univ. (Taiwan)
Yu Cheng Chang, National Central Univ. (Taiwan)
Chien Chieh Lee, National Central Univ. (Taiwan)
Chi Ming Wang, National Central Univ. (Taiwan)


Published in SPIE Proceedings Vol. 5183:
Lithographic and Micromachining Techniques for Optical Component Fabrication II
Ernst-Bernhard Kley; Hans Peter Herzig, Editor(s)

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