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Proceedings Paper

MEMS mirror array for a wavelength-selective 1xK switch
Author(s): Daniel O. Lopez; Flavio Pardo; Vladimir A. Aksyuk; M. E. Simon; Herbert R. Shea; Dan M. Marom; David T. Neilson; Raymond A. Cirelli; Fred P. Klemens; William M. Mansfield; Linus A. Fetter; E. Bower; John F. Miner; T. W. Sorsch
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Paper Abstract

We present a new MEMS mirror device that fulfills the requirements needed for its use in a wavelength selective switch. The MEMS device consists of a 1D array of individually controllable tilt micromirrors with almost 100% filling factor. Each mirror in the array is used to manipulate an individual wavelength channel, attenuating or redirecting it into a different output. The mirrors are electrostatically rotated around a fixed pivot and they use a novel concept of angle amplification to increase their out-of-plane angular rotation. A detailed analysis of their mechanical and optical response is presented.

Paper Details

Date Published: 24 April 2003
PDF: 11 pages
Proc. SPIE 5116, Smart Sensors, Actuators, and MEMS, (24 April 2003); doi: 10.1117/12.504381
Show Author Affiliations
Daniel O. Lopez, Lucent Technologies/Bell Labs. (United States)
New Jersey Nanotechnology Consortium (United States)
Flavio Pardo, Lucent Technologies/Bell Labs. (United States)
Vladimir A. Aksyuk, Lucent Technologies/Bell Labs. (United States)
M. E. Simon, Lucent Technologies/Bell Labs. (United States)
Herbert R. Shea, Lucent Technologies/Bell Labs. (United States)
Dan M. Marom, Lucent Technologies/Bell Labs. (United States)
David T. Neilson, Lucent Technologies/Bell Labs. (United States)
Raymond A. Cirelli, Lucent Technologies/Bell Labs. (United States)
New Jersey Nanotechnology Consortium (United States)
Fred P. Klemens, Lucent Technologies/Bell Labs. (United States)
New Jersey Nanotechnology Consortium (United States)
William M. Mansfield, Lucent Technologies/Bell Labs. (United States)
New Jersey Nanotechnology Consortium (United States)
Linus A. Fetter, Lucent Technologies/Bell Labs. (United States)
New Jersey Nanotechnology Consortium (United States)
E. Bower, Lucent Technologies/Bell Labs. (United States)
John F. Miner, Lucent Technologies/Bell Labs. (United States)
T. W. Sorsch, Lucent Technologies/Bell Labs. (United States)
New Jersey Nanotechnology Consortium (United States)


Published in SPIE Proceedings Vol. 5116:
Smart Sensors, Actuators, and MEMS
Jung-Chih Chiao; Vijay K. Varadan; Carles Cané, Editor(s)

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