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Proceedings Paper

Low- and mid-spatial-frequency component measurement for aspheres
Author(s): Michael Schulz; Ingolf Weingaertner; Clemens Elster; Joachim Gerhardt
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Paper Abstract

The Large Area Curvature Scanning (LACS) method for measuring all types of surfaces including aspheres is based on scanning the surface at discrete lateral coordinate positions, but the amount of information captured during measurement is much greater. The Extended LACS (ELACS) method will be presented that uses this information to evaluate also the mid-spatial frequency components of the surface. An examples of measurement for a surface showing a relatively high mid-spatial frequency content is given and ELACS is compared to other methods. These are various methods subsumed under the term “stitching,” especially stitching interferometry. Different mathematical concepts for these methods are briefly discussed and a novel approach is presented and analyzed with special emphasis being laid on the uncertainty which can be achieved with stitching methods.

Paper Details

Date Published: 4 November 2003
PDF: 9 pages
Proc. SPIE 5188, Advanced Characterization Techniques for Optics, Semiconductors, and Nanotechnologies, (4 November 2003); doi: 10.1117/12.503699
Show Author Affiliations
Michael Schulz, Physikalisch-Technische Bundesanstalt (Germany)
Ingolf Weingaertner, Physikalisch-Technische Bundesanstalt (Germany)
Clemens Elster, Physikalisch-Technische Bundesanstalt (Germany)
Joachim Gerhardt, Physikalisch-Technische Bundesanstalt (Germany)

Published in SPIE Proceedings Vol. 5188:
Advanced Characterization Techniques for Optics, Semiconductors, and Nanotechnologies
Angela Duparre; Bhanwar Singh, Editor(s)

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