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Proceedings Paper

Optimization of polishing processes by using iTIRM for in situ monitoring of surface quality
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Paper Abstract

The possibilities of iTIRM, an in-process surface measurement tool, are explored in this research. Experiments are done to test the applicability for qualifying and optimizing finishing processes for optical surfaces. Several optical glasses, different polishing agents and ductile grinding are included in these experiments. It is concluded that iTIRM can be used for both mentioned applications but that it is, at least for now, an R&D tool only and not applicable in production.

Paper Details

Date Published: 22 December 2003
PDF: 7 pages
Proc. SPIE 5180, Optical Manufacturing and Testing V, (22 December 2003); doi: 10.1117/12.503679
Show Author Affiliations
Mark Meeder, FISBA OPTIK AG (Switzerland)
Thomas Mauret, FISBA OPTIK AG (Switzerland)
Silvia M. Booij, Technische Univ. Delft (Netherlands)
Joseph J. M. Braat, Technische Univ. Delft (Netherlands)
Oliver W. Faehnle, FISBA OPTIK AG (Switzerland)

Published in SPIE Proceedings Vol. 5180:
Optical Manufacturing and Testing V
H. Philip Stahl, Editor(s)

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